文章摘要
莫德云,马 平,弓满锋.气膜结构对长光栅刻制气浮平台气膜特性的影响[J].润滑与密封,2016,41(3):101-106
气膜结构对长光栅刻制气浮平台气膜特性的影响
  
DOI:10.3969/j.issn.0254-0150.2016.03.020
中文关键词: 气浮平台  承载力  速度死区  耗气量
英文关键词: air bearing table  load capacity  dead zone velocity  gas consumption
基金项目:国家自然科学基金项目(50775043);广东省自然科学基金项目(S2013010013385);岭南师范学院校级青年基金项目(QL1403)
作者单位E-mail
莫德云 岭南师范学院机电工程研究所 dewin_mo@163.com 
马 平 岭南师范学院机电工程研究所  
弓满锋 岭南师范学院机电工程研究所  
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中文摘要:
      为满足长光栅刻制气浮平台的设计要求,通过建立气浮导轨上气膜面的有限元模型,以承载能力、耗气量及流场“死区”速度作为性能指标,分析不同的节流器和均压槽形式对气浮导轨气膜特性的影响。结果表明:不同的导轨结构会造成压力场特性发生变化,进而影响气膜承载力、死区速度及耗气量;3×3节流器王字型均压槽的结构形式能有效提高承载能力,消除速度死区,且耗气量未明显增加,该结构能满足长光栅刻制对气浮平台长时间工作的要求。
英文摘要:
      In order to meet the design requirements of air bearing table of large stroke raster engraving,the finite element model of gas film was established,and the effects on the gas film characteristics of the air bearings by different layouts of restrictors and pressure groove structures were analyzed with load capacity,gas consumption,and dead zone velocity as the main indexes.The results reveal that the different air bearing structures will cause various pressure characteristics,which will impact the load capacity,gas consumption and dead zone velocity.The structure of 3×3 restrictor and Wang shaped pressure groove can improve the load capacity,eliminate dead zone velocity of the air bearings and increase gas consumption slightly,it can meet the long time working requirements of air bearing table for large stroke raster engraving.
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